The emphasis was put on the critical indentation depth with the influence of the yield strength ratio of the soft film to the harder substrate and the size of the indenter.

• 重点研究了平压头压入过程中；不同屈服强度比(软薄膜屈服强度与硬基体屈服强度之比)以及不同压头尺寸下硬基体对压痕规律的影响.