The electron excitation temperature,electron temperature and electron density were obtained using respectively the electron energy probability function,Fermi-Dirac model and Schottky diffusion theory of low pressure discharge.

• 通过电子能量概率函数方法、Fermi-Dirac模型、低气压放电的Schottky扩散理论；分别计算了等离子体的电子温度、电子激发温度和电子密度.