The effect of many factors on the growth of thin films is especially analyzed and generalized, such as surface topography, structure defect of substrate, deposition temperature, and so on.

• 特别对基底的表面形貌、结构缺陷、沉积温度等因素对薄膜生长影响的蒙特卡罗方法模拟的研究进展进行了分析和归纳。