The distribution of the microwave plasma were measured by Langmuir probe and the temperature distribution of the microwave plasma in quartz tube reactor by the thermal couple meter.

• 针对矩形波导微波化学反应器,在低气压,低功率,纯甲烷微波放电情况下,用朗缪尔探针测量了石英反应管内等离子体的分布,用热偶计测量了微波等离子体在空间的温度分布。