The discomposed temperature of CNx film is about 600, sp3 C-N bond is the most stable bonding structure in the CN bonds types of the films.Field emission property of CNx films is studied.

• 利用高温退火研究了CNx膜的热稳定性，其热分解温度为600度左右，退火破坏了结合较弱的CN键并造成了大量的N损失，其中sp3C-N键最为稳定。