The development of MEMS prototypical piezoelectric micro-motor got along with the fundamental, driving mechanism, tiny dimension, simplest structure and maxim power output potential analysis of the piezoelectric motor.

• 微机械压电微电机原型机研究在压电电机的基本理论、致动机理、总体尺寸微型化、最简化结构设计和极限动力性能潜力分析方面取得了实质性进展。