The design method of the acoustic system was presented based on analyzing the working principle of acoustics system,and acoustics system for ultrasonic machining of Sic mirror was designed.

• 在分析超声声学系统工作原理的基础上,给出了该声学系统的具体设计方案,并且专门针对硅镜超声加工声学系统进行了设计及实验。