The dependence of the TFT properties on the active layer thickness is also analysised, and the best active thickness is about 200 nm, which is basically consistent with experiment results.

• 文中从理论上分析了有源层厚度与 TFT特性的关系 ,计算的最佳有源层的厚度约为 2 0 0 nm,这与实验结果基本一致。