The chemical microetching on copper surface with three-dimensional(3D) gear-like molds was realized by confined etchant layer technique(CELT).

• 运用约束刻蚀剂层技术 (CELT)在金属铜 (Cu)表面实现了三维微图形加工 ,取得成功的关键因素在于寻找到能对Cu进行有效CELT加工的化学刻蚀和捕捉体系。