The brief overview and the internal and international researches about transport phenomena in MOCVD reactor were discussed in this paper, especially for the transport process of showerhead reactor.

• 论述了MOCVD反应器的基本概念和国内外对反应器中输运现象的研究情况,重点论述了垂直喷淋式MOCVD反应器的研究,并指出了当前研究中存在的问题,展望了未来的研究发展趋势。