The application of SIEMENS PLC in thickness gauge of thin films is studied, and the merits and demerits of electric control systems based on industrial computer and PLC are compared.

• 摘要对西门子PLC（可编程控制器）在薄膜测厚仪上的应用进行了研究，并比较了传统的以工控机为核心的电控系统与以PLC为电控核心的系统的优缺点。