The angular distribution of sputtered atoms of Ag target bombarded by28 Sin-n= 1,2) is measured using collection film technique combined bwith Rutherford backsc-attering spectroscopy.

• 用原子捕获膜技术结合卢瑟福背散射谱,测定了具有相同原子能量(16keV/原子)的~(25)Si_m~-(n=1,2)离子冲击Ag靶的溅射原子角分布。