The active energy of the reaction between the adsorption of SiCl4 on silicon and H2 is lower than that of SiCU direct react with H2 in gas phase, so it can be concluded that the silicon substrate has the catalysis in the reaction process.

• SiCl_4吸附后的产物与H_2的反应均要低于其在气相反应中所需的活化能,因此反应主要在衬底上发生,且衬底在反应中起到了一定的催化作用。