The abundant reserves of raw material, low cost, no poison, easy to dope, good stability in plasm and easy to etch make ZAO films a substitute of ITO, specially in solar cells field.

• ZAO薄膜原料易得,制造成本低廉,无毒,易于实现掺杂,且在等离子体中稳定性好,易刻蚀,因而有可能成为ITO的替代产品,尤其是在太阳能电池透明电极领域。