The X ray Photoelectron Spectroscopy (XPS) has been used for the element qualitation,quantitation,chemical state analysis and depth profile of InGaAsP/InP MOCVD film.

• 采用X射线光电子能谱（XPS）对InGaAsP/InP异质结构MOCVD外延晶片作了表面薄层元素、组分定性、定量和深度分布分析。