The W/B4C X-ray periodic multilayer films with small period (d=4.2nm) are fabricated by the high vacuum magnetron sputtering technology, and its structure was measured by D1 XRD from BEDE Company, UK.
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释义
采用高真空磁控溅射技术,实现不同周期的W/B4C周期多层膜的制备。 利用英国BEDE公司出产的D1高分辨X射线衍射仪,完成W/B4C周期多层膜周期结构的测量。
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