The TiN thin films were produced on die steel surface by the method of CO2 continuous laser chemical vapor deposition(LCVD)with wavelength 10.6 mm,the microstructure and morphology of which was analyzed by XRD,OM,SEM,and EDS.

• 利用波长为10.；6mm的CO2连续激光诱导化学气相沉积的方法；在模具钢基体上沉积TiN类薄膜。 采用XRD、OM、SEM、EDS等手段分析薄膜的组织和相结构。