The Schottky barrier height is increased, and the ideality factor is decreased to unity with decreasing the Pd grain size and particle size distribution.

• 论文后段则探讨以无电镀法制备之钯/砷化镓以及钯/氧化层/砷化镓元件于氢气感测效果之差异，并探讨不同钯膜微结构对于氢气感测性能之影响。