The Auger electron spectromy (AES) and globe angle X-ray diffraction (GAXRD) are applied to analyze the element distribution and phase structure of modified layers.

• 利用俄歇能谱仪(AES)分析改性层中元素的浓度分布,用低角度X射线衍射仪(GAXRD)分析离子注入层的结构。