TEM and HRTEM micro graphs show that thin a BN and h BN layers exist at the c BN and the substrate interface,and that (0002) h BN is in the surface normal direction of the substrate and single phase c BN grows on top of the interface layers.

• TEM及HRTEM对膜的断面结构分析表明 ,在膜与基片的界面处存在很薄的非晶氮化硼和六方氮化硼 (h BN)层 ,h BN(0 0 0 2 )晶面垂直于基片表面 ,在界面层之上生长着单相c BN层