Self-bias voltage of the dielectric substrate surface and voltage of the driven electrode were experimentally studied to improve the energy control of impinging ion in plasma processes.

• 在薄膜沉积和离子束刻蚀技术中,通常要给绝缘基片加上一个射频或脉冲电极,以便在绝缘基片上形成一个自偏压来控制轰击到绝缘基片表面的离子能量。