Production of Ca+ and He+ ions by Freeman source under the auxiliary of inert gas and the microstructure analysis of both implanted titanium foil and nano- Ti film were described.

• 介绍了由弗里曼离子源在惰性气体辅助下产生Ca+、He+的研究及其分别注入钛箔和纳米钛膜的微结构分析。