Polycrystalline VO2 thin film was prepared using modified Ion Beam Enhanced Deposition from V2O5 powder.The IBED VO2 film has higher thermal coefficient of resistance, dense and stable structure.

• 摘要用改进了的离子束增强沈积方法从V2O5粉末直接制备了VO2多晶薄膜，薄膜具有较高的温度系数和致密、稳定的结构。