Phase change recording medium GeSb2Te4t hin film is prepared by RF-magnetron sputtering, Thermal annealing effects on the optical and structural properties of GeSb2Te4 thin films have been studied systematically.

• 采用高频磁控溅射制备了GeSb_2Te_4薄膜.；系统地研究了真空热退火对GeSb_2Te_4薄膜光学性质和晶体结构的影响