Pb(Zr0.52Ti0.48)O3 (PZT) and (Ba0.7Sr0.3)TiO3 (BST) ferroelectric thin films with distinct perovskite microstructure were prepared by RF magnetron sputtering method ,following a rapid thermal annealing (RTA) process.

• 应用射频磁控溅射方法；利用快速热退火(RTA)工艺；分别制备出了具有良好铁电性能的 Pb(Zr0.；52Ti0