Ozone technology was evaluated to replace the SPM process.The advantage is its strong oxidization capability for organics like photoresist.After reacting, there is no problem of chemical wastewater.

• 因此研究臭氧技术被来取代现有光阻去除剂，其优点是去除后效果与现行的方式相同，而且反应后没有废水与废酸的处理问题。