Nanocrystalline free-standing diamond films were deposited by 30kW DC Arc Plasma Jet CVD method on Molybdenum substrate with mixed fed gasses of Argon, Hydrogen and Methane.
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释义
在30kW级DC Arc Plasma Jet CVD(直流电弧等离子体喷射化学气相沉积)设备上,采用Ar-H2-CH4混合气体,在Mo的衬底上沉积出纳米金刚石自支撑膜。
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