Micro-electromechanical systems (MEMS) are micron-scale sensing and/or actuation devices integrated on a chip. With the development of Microelectronic Mechanical System, it is found wide application in industries and national defense.

• 随着微电子机械系统(Microelectronic Mechanical System，MEMS)技术的兴起和发展，MEMS器件已大量应用于国防和民用产品。