Micro-electromechanical systems (MEMS) are micron-scale sensing and/or actuation devices integrated on a chip. With the development of Microelectronic Mechanical System, it is found wide application in industries and national defense.
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释义
随着微电子机械系统(Microelectronic Mechanical System,MEMS)技术的兴起和发展,MEMS器件已大量应用于国防和民用产品。
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