Micro cantilever electromagnetic actuator is described.Numerical models about the magnetic force and displacement of the beam are established according to the electromagnetics principle.3.

• 3.；建立了平面线圈磁场的数学模型；推导出电磁式微致动器悬臂梁的变形与致动器各个参数之间的关系；并进行参数匹配。