Micro Electro Mechanical systems (MEMS) are integrative micro-device systems that consist of micro-sensor, micro-actuator, controlling and signal processing circuit, communication interface and electrical source.

• 微电子机械系统(Micro Electro Mechanical systems，简称MEMS)是由微传感器、微执行器、信号处理和控制电路、通讯接口和电源等部件组成的一体化的微型器件系统。