MFC GAS Feedthrough Numbers? Mass O2 needed? (It means: Protection against Reoxidation needed. Oil Free Pump needed. High speed and ultra-high vacuum Pump needed.

• 流量控制器气体通道种类、数量？是否需要大量氧气？(是否意味着：因为要防止二次氧化而需要无油真空泵和高速、超高真空泵。