MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.

• 微机电系统(MEMS)将是21世纪最重要的研究领域之一,而微能源器件是MEMS其中一个重要分支,其发展直接关系到MEMS在某些领域中的应用。