Laser scribing of InSb with a Q switched Nd:YAG laser was studied in this paper and the relationship between pulse frequency and groove depth and width has been obtained.

• 研究了利用调 Q Nd： Y A G 激光对 In Sb 的激光划片，得出了刻槽深度和宽度与脉冲重复频率之间的关系。