Keywords thin film transistor,amorphous silicon,polycrystalline silicon,laser annealing,localized states,transistor mobility,field emission,Ohm connection,signal delay;

• 薄膜晶体管;非晶硅;多晶硅;激光退火;隙态密度;载流子迁移率;场助热电子发射;欧姆接触;信号延迟;