Keywords Sapphire;Infrared;Antireflective and Protective Thin Film;Silicon Dioxide;Silicon Nitride;Radio Frequency Magnetron Reactive Sputtering;Rain Erosion Test;High Temperature Strength;

• 蓝宝石;红外;增透保护膜;氧化硅;氮化硅;射频磁控反应溅射;雨蚀试验;高温强度;