Keywords Array waveguides gratings;Silica-on-silicon;Mux/Demux;Beam propagation method;Waveguides stress;Reactive ion etching;Plasma enhanced chermic vapor deposition;Anneal process;

• 阵列波导光栅;硅基二氧化硅;复用/解复用器;光束传输方法;波导应力;反应离子刻蚀;等离子体增强化学气相沉积;退火工艺;