It needs to mention that the thermal stress, thermal field and heat radiation from crystal stick on the chamber can not be ignored in the design of the chamber.

• 结构设计中还应对炉室工作时的热应力及其作用加以考虑,热场设计中应对炉室内壁材料的晶间敏化问题和单晶棒产生的热辐射予以重视。