It is shown that the bulk etching rate as a function of etching temperature can be described by Arrhenius equation Vb=ae-E/KT.

• 研究结果表明；体蚀刻速度与蚀刻温度遵守Arr-henius方程V_b=a·e~(-E/KT)；其中；体激活能E=0.；66±0。