It is possible to smooth the impact of the grating signal subdivision circuit time-delay on the dynamic performance of CMMs when the grating measuring scale with the measuring precision of nanometer is studied based on two times Moire fringe principle.

• 基于二次莫尔条纹原理探讨了纳米测量精度光栅测量标尺,将有可能改善目前光栅信号细分电路延时对测量机动态性能的影响。