It includes two wet process tanks and the rotatable lifter robot, which helps transfer the wafer basket from one tank to the other, and can be driven by the cylinder or motor.

• 由两个独立的湿处理工艺槽和旋转升降机械手组成，机械手负责将基片篮在两个工艺槽之间转换，机械手可以是气缸或者电机驱动。