In ultraprecision machining, multi probe methods are widely used for measuring the straightness error of the workpiece to separate the straightness motion error of the carriage.

• 在超精密加工中,用多测头方法测量工件直线度时,需要采用误差分离的方法分离出溜板的运动误差,并用一定的算法重构工件表面的直线度。