In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated.

• 本研究同时也以稜镜耦合系统，频谱式椭偏仪等仪器，量测各波长下以不同雷射发数及雷射重复率照射后BCB的折射率；