In this thesis, we provide a new .fabrication: using nanoparticles to fabricate erbium doped luminescence thin film.We mix nanoparticles and use spin coating process to deposit it on a silicon wafer.

• 这篇论文提出新的制程方法：使用奈米粒子制作掺铒发光薄膜，利用奈米粒子混合旋布玻璃并旋涂于矽基板上。