In this study, the rf magnetron sputtering was used to deposit BZT ferroelectric thin films on Pt/Ti/SiO2/Si and ITO/glass substrates, and MFM and MFIS structures were also fabricated.

• 根据系统面板化的观念，对于非晶矽薄膜电晶体与多晶矽薄膜电晶体主动阵列显示器之应用，其电晶体的切换特性也被广泛地讨论与研究。