In this paper,the author analyzed the parasitic resistances model of short channel MOSFETs,inves-tigate the reason why the error is large at the low Vg.

• 该文分析了短沟道寄生电阻模型,研究了短沟道寄生电阻模型在栅压较小时与模拟结果存在较大误差的原因,并对模型进行了改进。