In this paper the fringe effect is explained by a horizontal diffusional flow, and a semiquantitative estimation is made by means of a two-dimensional diffusion model in the stagnant layer.

• 本文认为边缘效应的起因在于反应物沿衬底表面的水平扩散流,并提出了一个二维扩散滞流层模型。从这个模型出发,可以半定量地估计各工艺参数与边缘效应的关系,理论与实验观察很好地一致。