In this dissertation, by mixing benzoic and adipic acid as the source of proton exchange, wet etched ridge waveguides are successfully fabricated in LiNbO3.

• 摘要:本论文以混合苯甲酸和己二酸作为质子酸源，在铌酸锂基板上进行质子交换溼式蚀刻法制作脊形光波导及元件。