In the conventional technology,TiO2 film is usually used as an anti-reflection (AR) coating. The SiN layer which is produced by PECVD,is also widely used not only as a good AR coating,but also as an effective surface passivation layer.

• 除了传统的由TiO2作为成反射膜的工艺外,由等离子体化学气相沉积法(PECVD)制作的SiN是很有效的减反射膜,又是有效的表面钝化膜。