In order to simplify the MWECR-CVD system using multiple electromagnetic coils, the new magnetic fields generated by assembling a electromagnetic coils and a permanent magnet unit are presented.

• 摘要为了简化多电磁线圈MWECR-CVD装置，提出将单个电磁线圈和一个永磁体单元组合，以形成所需的新型磁场。