Improve medium beam current implanter of EATON company of US gives off big beam current, to bring high speed mobility into actuality in production, speeding up technology process.

• 标准注入参数的调整，以及实现高速注入所应采取的各种手段，尽量发挥离子注入机的潜能，使中束流注入机也可以注入大束流，在生产上实现高速机动，加快了工艺流程。